Evaporation Chamber with front O-ring sealing door
Substrate shutter is Closed Loop controlled to open/close by Thin Film Controller
System safety Interlock
Total Auto Control or manual operation by computer
Optional Glove Box
Configuration
Evaporation Chamber | 304 stainless steel chamber with viewport
|
Vacuum Pumping | Turbo pump or cryopump and dry rough pump
|
Vacuum Valve
| Pneumatic valves
|
Evaporation Source
| Multiple thermal evaporation source |
Sample Stage
| Top or side mounted rotatable sample stage
|
Film Control
| Crystal Film thickness Monitor and Control
|
Vacuum Gauging
| Wide range vacuum gauge and rough gauge
|
Specification
The Base Vacuum Pressure
| Better than 5E-7Torr
|
Sample Loading Capacity
| One Max. 6 inch flat substrate
|
Film Uniformity
| +/-5% on 6” substrate |
Rate Resolution
| 0.1 Angstroms/sec |
Thickness Resolution
| 0.1 Angstroms
|
Typical Application
For R & D Thin Film Deposition
Ideal tools for LIFT-OFF process
Evaporate metal, Semiconductor, Insulation Materials or OLED
